In recent years there has been an increasing demand for low-T packaging technologies to vacuum seal MEMS devices at the wafer level. When caps are fabricated us

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applica

This book introduces microelectromechanical systems (MEMS) packaging utilizing polymers or thin films – a new and unique packaging technology. It first invest

This book shows how nanofabrication techniques and nanomaterials can be used to customize packaging for nano devices with applications to electronics, photonics

Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power c

Although there is increasing need for modeling and simulation in the IC package design phase, most assembly processes and various reliability tests are still ba

Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at

The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance an

This volume, a continuation of the MEMS, NEMS, and molecular machines symposium of the 2002 MRS Fall Meeting, is devoted to the investigation of materials and d

This comprehensive handbook has become the definitive reference work in the field of nanoscience and nanotechnology, and this 4th edition incorporates a number